Author Details
Киселев, Д. А.
| Issue | Section | Title | File |
| No 12 (2024) | Articles | Study of zinc implanted silicon nitride film |
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
compact neutron source
density functional theory
electron microscopy
electronic structure
ion implantation
irradiation
magnetron sputtering
microstructure
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Information
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User
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
compact neutron source
density functional theory
electron microscopy
electronic structure
ion implantation
irradiation
magnetron sputtering
microstructure
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Information