Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source

V. E. Guseva; Гусева В. Е.; M. A. Korepanov; Корепанов М. А.; M. R. Koroleva; Королева М. Р.; A. N. Nechay; Нечай А. Н.; A. A. Perekalov; Перекалов А. А.; N. N. Salashchenko; Салащенко Н. Н.; N. I. Chkhalo; Чхало Н. И.

doi:10.31857/S0032816223030217

Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source

作者: Guseva V.E.¹, Korepanov M.A.², Koroleva M.R.², Nechay A.N.³, Perekalov A.A.³, Salashchenko N.N.³, Chkhalo N.I.³
隶属关系:
1. Lobachevsky Nizhny Novgorod State University
2. Udmurt Federal Research Center, Ural Branch, Russian Academy of Sciences
3. Institute of Physics of Microstructures, Russian Academy of Sciences
期: 编号 4 (2023)
页面: 145-155
栏目: ЛАБОРАТОРНАЯ ТЕХНИКА
URL: https://rjdentistry.com/0032-8162/article/view/670499
DOI: https://doi.org/10.31857/S0032816223030217
EDN: https://elibrary.ru/CVWMRJ
ID: 670499

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详细

Methods for the formation of liquid, microdroplet, cluster, and gas targets in vacuum for use in laser-plasma radiation sources are considered. The characteristics of the used target-formation systems and gas-supply systems based on them are given. These systems form pulsed and static jets with low mass flow, on the order of ~70 mL/h of liquid or 1500 cm3/h of gas, which allows pumping out the vacuum volume with one turbomolecular pump with a capacity of 1000 L/s.

作者简介

V. Guseva

Lobachevsky Nizhny Novgorod State University

Email: nechay@ipm.sci-nnov.ru
603950, Nizhny Novgorod, Russia

M. Korepanov

Udmurt Federal Research Center, Ural Branch, Russian Academy of Sciences

Email: nechay@ipm.sci-nnov.ru
426065, Izhevsk, Russia

M. Koroleva

Udmurt Federal Research Center, Ural Branch, Russian Academy of Sciences

Email: nechay@ipm.sci-nnov.ru
426065, Izhevsk, Russia

A. Nechay

Institute of Physics of Microstructures, Russian Academy of Sciences

Email: nechay@ipm.sci-nnov.ru
603087, Nizhny Novgorod, Russia

A. Perekalov

Institute of Physics of Microstructures, Russian Academy of Sciences

Email: nechay@ipm.sci-nnov.ru
603087, Nizhny Novgorod, Russia

N. Salashchenko

Institute of Physics of Microstructures, Russian Academy of Sciences

Email: nechay@ipm.sci-nnov.ru
603087, Nizhny Novgorod, Russia

N. Chkhalo

Institute of Physics of Microstructures, Russian Academy of Sciences

编辑信件的主要联系方式.
Email: nechay@ipm.sci-nnov.ru
603087, Nizhny Novgorod, Russia

参考

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